Download the ANSYS MEMS Material library. The library is in the ANSYS Programing Design Language (APDL) format and contains 20 common MEMS materials in SI units, bulk, and thin film properties. Linear material properties only. Materials such as Polysilicon, Silicon Oxide, nitride and thin film metals. This is intended to be a starting point for your simulation requirements. Each material data file contains the reference used for the property(s).
使用方法：
1）Download the archive and unzip into a new folder called "MEMS materials".
2）Put this folder in your ANSYS/Matlib directory.
3）The material data can be accessed from the ANSYS Material library GUI. The Menu path is: Main Menu>Preprocessor>Material Props>Import Library.